The physics of microfabrication /
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | Slovak English |
| Published: |
New York London :
Plenum Press,
1984.
|
| Edition: | 1st ed. |
| ISBN: |
(viaz.) |
| Physical Description: |
593 s. |
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| 100 | 1 | |a Brodie, Ivor |4 aut | |
| 245 | 1 | 4 | |a The physics of microfabrication / |c Ivor Brodie, Julius J. Muray. |
| 250 | |a 1st ed. | ||
| 260 | |a New York |a London : |b Plenum Press, |c 1984. | ||
| 300 | |a 593 s. | ||
| 700 | 1 | |a Muray, Julius J. |4 aut | |
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