Process engineering analysis in semiconductor device fabrication /
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York ; St. Louis ; San Francisco :
McGraw-Hill, Inc.,
1993.
|
| Edition: | 1. vyd. |
| Series: | McGraw-Hill chemical engineering series
|
| Subjects: | |
| ISBN: |
0070418535 (viaz.) |
| Physical Description: |
xvii, 774 s. : il. ; 24 cm. |
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| Physical Description: | xvii, 774 s. : il. ; 24 cm. |
|---|---|
| Bibliography: | Bibl. odkazy; register: s. 757-774 |
| ISBN: | 0070418535 (viaz.) |