An introduction to semiconductor microtechnology /
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Chichester New York : New York :.
John Wiley & Sons,
1983
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| Series: | A Wiley-Interscience publication
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| ISBN: |
(brož.) |
| Physical Description: |
167 s. : il. |
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