Journal of vacuum science and technology. Part A, Vacuum, surfaces and films
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| Previous Title: | Journal of vacuum science and technology |
|---|---|
| Format: | Journal |
| Language: | English |
| Published: |
New York :
American Institute of Physics,
1983-
|
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| Published: | 1983----- |
|---|---|
| Publication Frequency: | 6x ročne |
| ISSN: | 0734-2101 0022-5355 |