Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton :
CRC Press,
c2012.
|
| Edition: | 3rd ed. |
| Subjects: | |
| ISBN: |
9781420055160 (viaz.) 9780849331800 (súbor) |
| Physical Description: |
xiii, 636 s. : fotogr., grafy, il., sch., tab. ; 28 cm. |
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