Technologija tonkich i tolstych plenok dlja mikroelektroniki /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | Russian |
| Published: |
Moskva :
Metallurgija,
1980.
|
| Physical Description: |
110 strán. |
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| 040 | |a SVKKK |b slo |c SVKKK |e rda | ||
| 100 | 1 | |a Jowett, Charles E. |4 aut | |
| 245 | 1 | 0 | |a Technologija tonkich i tolstych plenok dlja mikroelektroniki / |c Charles E. Jowett. |
| 264 | 1 | |a Moskva : |b Metallurgija, |c 1980. | |
| 300 | |a 110 strán. | ||
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