Showing 1 - 2 results of 2 for search '"Journal of Vacuum Science and Technology"'
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  1. 1
    Journal of vacuum science and technology. Part A, Vacuum, surfaces and films
    Published 1983
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  2. 2
    Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
    Published 1991
    “...Journal of vacuum science and technology...”
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