Introduction to microfabrication /
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Main Author: | |
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Format: | Book |
Language: | English |
Published: |
Hoboken :
John Wiley & Sons,
c2004
|
Edition: | [1st ed.] |
Subjects: | |
ISBN: |
0470851058 (viaz.) |
Physical Description: |
xvii, 401 s. : grafy, il., tab. ; 25 cm |
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