Introduction to microfabrication /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Hoboken :
John Wiley & Sons,
c2004
|
| Edition: | [1st ed.] |
| Subjects: | |
| ISBN: |
0470851058 (viaz.) |
| Physical Description: |
xvii, 401 s. : grafy, il., tab. ; 25 cm |
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