Process engineering analysis in semiconductor device fabrication /
Uložené v:
| Hlavní autori: | , |
|---|---|
| Médium: | Kniha |
| Jazyk: | English |
| Vydané: |
New York ; St. Louis ; San Francisco :
McGraw-Hill, Inc.,
1993.
|
| Vydanie: | 1. vyd. |
| Edícia: | McGraw-Hill chemical engineering series
|
| Témy: | |
| ISBN: |
0070418535 (viaz.) |
| Fyzický popis: |
xvii, 774 s. : il. ; 24 cm. |
| Tagy: |
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