Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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| Predchádzajúci názov: | Journal of vacuum science and technology. B, Microelectronics processing and phenomena |
|---|---|
| Korporatívny autor: | |
| Médium: | Časopis |
| Jazyk: | English |
| Vydané: |
New York :
American Institute of Physics,
1991-
|
| Tagy: |
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Titul je dostupný aj v ... 
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| 222 | 0 | |a Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena | |
| 245 | 0 | 0 | |a Journal of vacuum science & technology. |n B, |p Microelectronics and nanometer structures processing, measurement and phenomena |h [mikrofiš] / |c American Vacuum Society |
| 246 | 3 | 3 | |a Microelectronics and nanometer structures processing, measurement and phenomena |
| 246 | 3 | 3 | |a Journal of vacuum science and technology |
| 246 | 3 | |a Microelectronics and nanometer structures | |
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| 362 | 0 | |a 9 (1991)----- | |
| 710 | 2 | |a American Vacuum Society | |
| 780 | 0 | 0 | |t Journal of vacuum science and technology. B, Microelectronics processing and phenomena |x 0734-211X |
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