Nanolithography and patterning techniques in microelectronics /
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| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Cambridge :
Woodhead Publishing Limited,
2005.
|
| Edition: | 1st ed.. |
| Series: | Woodhead publishing in materials
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| Subjects: | |
| ISBN: |
9781855739314 (viaz.) |
| Physical Description: |
xiv, 409 s. : fotogr., grafy, il., tab. ; 24 cm. |
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