Nanolithography and patterning techniques in microelectronics /
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| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Cambridge :
Woodhead Publishing Limited,
2005.
|
| Edition: | 1st ed.. |
| Series: | Woodhead publishing in materials
|
| Subjects: | |
| ISBN: |
9781855739314 (viaz.) |
| Physical Description: |
xiv, 409 s. : fotogr., grafy, il., tab. ; 24 cm. |
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| 245 | 0 | 0 | |a Nanolithography and patterning techniques in microelectronics / |c edited by David G. Bucknall. |
| 250 | |a 1st ed.. | ||
| 260 | |a Cambridge : |b Woodhead Publishing Limited, |c 2005. | ||
| 300 | |a xiv, 409 s. : |b fotogr., grafy, il., tab. ; |c 24 cm. | ||
| 490 | 1 | |a Woodhead publishing in materials | |
| 504 | |a Bibl. odkazy; register: s. 399-409 | ||
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