Fundamentals of microfabrication and nanotechnology. Volume II, Manufacturing techniques for microfabrication and nanotechnology /
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Main Author: | |
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Format: | Book |
Language: | English |
Published: |
Boca Raton :
CRC Press,
c2012.
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Edition: | 3rd ed. |
Subjects: | |
ISBN: |
9781420055191 (viaz.) 9780809331800 (súbor) |
Physical Description: |
xiii, 656 s. : fotogr., grafy, il., sch.,tab. ; 28 cm. |
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