Fundamentals of microfabrication and nanotechnology. Volume II, Manufacturing techniques for microfabrication and nanotechnology /

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Bibliographic Details
Main Author: Madou, Marc J., 1953-
Format: Book
Language:English
Published: Boca Raton : CRC Press, c2012.
Edition:3rd ed.
Subjects:
ISBN: 9781420055191 (viaz.)
9780809331800 (súbor)
Physical Description: xiii, 656 s. : fotogr., grafy, il., sch.,tab. ; 28 cm.
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