Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications /

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Bibliographic Details
Main Author: Madou, Marc J., 1953-
Format: Book
Language:English
Published: Boca Raton : CRC Press, c2012.
Edition:3rd ed.
Subjects:
ISBN: 9781420055160 (viaz.)
9780849331800 (súbor)
Physical Description: xiii, 636 s. : fotogr., grafy, il., sch., tab. ; 28 cm.
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