Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications /
Uložené v:
| Hlavný autor: | |
|---|---|
| Médium: | Kniha |
| Jazyk: | English |
| Vydané: |
Boca Raton :
CRC Press,
c2012.
|
| Vydanie: | 3rd ed. |
| Témy: | |
| ISBN: |
9781420055160 (viaz.) 9780849331800 (súbor) |
| Fyzický popis: |
xiii, 636 s. : fotogr., grafy, il., sch., tab. ; 28 cm. |
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| 100 | 1 | |a Madou, Marc J., |d 1953- | |
| 245 | 1 | 0 | |a Fundamentals of microfabrication and nanotechnology. |n Volume III, |p From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications / |c Marc J. Madou. |
| 246 | 3 | 0 | |a From MEMS to bio-MEMS and bio-NEMS |
| 246 | 3 | 3 | |a Manufacturing techniques and applications |
| 250 | |a 3rd ed. | ||
| 260 | |a Boca Raton : |b CRC Press, |c c2012. | ||
| 300 | |a xiii, 636 s. : |b fotogr., grafy, il., sch., tab. ; |c 28 cm. | ||
| 500 | |a Biograf. údaje o aut. | ||
| 500 | |a Poznámky | ||
| 500 | |a Il. a tlač. text na predsádkach | ||
| 504 | |a Bibl. odkazy; register: s. 627-636 | ||
| 650 | 0 | 7 | |a nanotechnológia |2 SVKKKPH |
| 650 | 0 | 7 | |a mikroelektronické technológie |2 SVKKKPH |
| 650 | 0 | 7 | |a mikromechanika |2 SVKKKPH |
| 650 | 0 | 7 | |a nanotechnológie |2 SVKKKPH |
| 650 | 0 | 7 | |a mikrotechnológie |2 SVKKKPH |
| 650 | 0 | 7 | |a aplikovaná biofyzika |2 SVKKKPH |
| 655 | 7 | |a monografie |2 SVKKKPH | |
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