Creation of thin oxide films in a microwave oxygen plasma /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Praha :
Academia,
1983.
|
| Edition: | 1. edition |
| Series: | Rozpravy ČSAV
Ročník 93/1983. Sešit 3 |
| ISBN: |
(brož.) |
| Physical Description: |
86 strán. |
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