Ion Implantation in Semiconductors and Other Materials /
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| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York :
Plenum Press,
1973.
|
| Edition: | 1st ed. |
| Series: | The IBM research symposia series
|
| ISBN: |
(viaz.) |
| Physical Description: |
657 s. |
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