Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
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| Previous Title: | Journal of vacuum science and technology. B, Microelectronics processing and phenomena |
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| Corporate Author: | |
| Format: | Journal |
| Language: | English |
| Published: |
New York :
American Institute of Physics,
1991-
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| Published: | 9 (1991)----- |
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| Publication Frequency: | 6x ročne |
| ISSN: | 1071-1023 0734-211X |