Dielektričeskije plenki v mikroelektronike /
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | Russian |
| Published: |
Moskva :
Energija,
1977.
|
| Edition: | 1. izd. |
| Series: | Elektronnoje materialovedenije
|
| ISBN: |
(viaz.) |
| Physical Description: |
366 s. |
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