Obrabotka monokristallov v mikroelektronike /
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| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | Russian |
| Published: |
Moskva :
Radio i svjaz´,
1988
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| Edition: | 1. izd. |
| Series: | Massovaja biblioteka inženera elektronika
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| Subjects: | |
| ISBN: |
5256001396 (brož.) |
| Physical Description: |
103 s. |
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