Semiconductor lithography : principles, practices and materials /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
New York ; London :
Plenum Press,
1988
|
| Edition: | 1st ed. |
| Series: | Microdevices Physics and Fabrication Technologies
|
| ISBN: |
(viaz.) |
| Physical Description: |
931 s. |
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