Fundamentals of microfabrication and nanotechnology. Volume II, Manufacturing techniques for microfabrication and nanotechnology /
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| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton :
CRC Press,
c2012.
|
| Edition: | 3rd ed. |
| Subjects: | |
| ISBN: |
9781420055191 (viaz.) 9780809331800 (súbor) |
| Physical Description: |
xiii, 656 s. : fotogr., grafy, il., sch.,tab. ; 28 cm. |
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| Item Description: | Poznámky Il. a tlač. text na predsádkach Biograf. údaje o aut. |
|---|---|
| Physical Description: | xiii, 656 s. : fotogr., grafy, il., sch.,tab. ; 28 cm. |
| Bibliography: | Bibl. odkazy; register: s. 643-656 |
| ISBN: | 9781420055191 (viaz.) 9780809331800 (súbor) |