The physics of microfabrication /
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                  | Main Authors: | , | 
|---|---|
| Format: | Book | 
| Language: | Slovak English  | 
| Published: | 
      New York London :
        
      Plenum Press,    
    
      1984.
     | 
| Edition: | 1st ed. | 
| ISBN: | 
                  (viaz.) | 
    
| Physical Description: | 
                  593 s. | 
    
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| 100 | 1 | |a Brodie, Ivor |4 aut | |
| 245 | 1 | 4 | |a The physics of microfabrication / |c Ivor Brodie, Julius J. Muray. | 
| 250 | |a 1st ed. | ||
| 260 | |a New York |a London : |b Plenum Press, |c 1984. | ||
| 300 | |a 593 s. | ||
| 700 | 1 | |a Muray, Julius J. |4 aut | |
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