Hardness evaluation of a tungsten film deposited by plasma enhanced CVD technique

by Kottfer, D., Mrva, P., Pešek, L., Zubko, P.
Source: 1. Acta metallurgica slovaca 1. 1335-1532 1. Roč. 10, mimoriadne č. 1 (2004), s. 630-634

Optimalization of thin films deposition process

by Kottfer, D., Mrva, P., Olejník, F.R, Pešek, L.
Source: 1. Acta metallurgica slovaca 1. 1335-1532 1. Roč. 10, mimoriadne č. 1 (2004), s. 625-629