Description: Hardness evaluation of a tungsten film deposited by plasma enhanced CVD technique

Bibliographic Details
Main Authors:	Kottfer, D. (Author), Mrva, P. (Author), Pešek, L. (Author), Zubko, P. (Author)
Format:	Article
Language:	English
Subjects:	povlaky tenké volfrámové > vylučovanie chemické z plynnej fázy > tvrdosť
Source:	1. Acta metallurgica slovaca 1. 1335-1532 1. Roč. 10, mimoriadne č. 1 (2004), s. 630-634